Ghosts of Mars (2001)

Melanie Ballard, a headstrong police lieutenant on Mars in the year 2025. Humans have been colonizing and mining on the red planet for some time, but when Ballard and her squad are sent to apprehand the dangerous criminal James “Desolation” Williams, they discover that he’s the least of their worries. The mining opperations have unleashed a deadly army of Martian spirits who take over the bodies of humans and won’t stop until they destroy all invaders of their planet.